Spectroscopic Ellipsometry - Fujiwara Hiroyuki
Spectroscopic Ellipsometry - Fujiwara Hiroyuki Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. Beginning with an overview of SE…
Specifikacia Spectroscopic Ellipsometry - Fujiwara Hiroyuki
Spectroscopic Ellipsometry - Fujiwara Hiroyuki
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE).
The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.
Tegami Bachi Hiroyuki Asada
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