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Numerical Modeling Tools for Chemical Vapor Deposition

Development of general numerical simulation tools for chemical vapor deposition (CVD) was the objective of this study. Physical models of important CVD phenomena were developed and implemented into…

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Specifikacia Numerical Modeling Tools for Chemical Vapor Deposition


Development of general numerical simulation tools for chemical vapor deposition (CVD) was the objective of this study. Physical models of important CVD phenomena were developed and implemented into the commercial computational fluid dynamics software FLUEN

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