Microsystems Dynamics Ostasevicius VytautasPevná vazba
Microsystems Dynamics Ostasevicius VytautasPevná vazba Foreword; Preface; Introduction to Microsystems; Fabrication Technologies of Microsystems; Overview; Nickel Surface Micromachining Technology…
Specifikacia Microsystems Dynamics Ostasevicius VytautasPevná vazba
Microsystems Dynamics Ostasevicius VytautasPevná vazba
Foreword; Preface; Introduction to Microsystems; Fabrication Technologies of Microsystems; Overview; Nickel Surface Micromachining Technology for Fabrication of Microswitches; UV Lithography for Fabrication of Micromotors; Common MEMS Actuators; Parallel Plate Capacitors; Comb Drives; Electrostatic Micromotors; Electrostatic Microswitches; Theoretical Background of Multiphysical Interactions Common in Microsystems; Introduction to Coupled-Field Modeling; Electrostatic Actuation and Pull-in Instability; Viscous Air Damping; Vibro-Impact Interactions; Experimental Testing of Microsystem Dynamics; Vibration Excitation Methods; Optical Techniques for Measurement of Vibrations of Microstructures; Study of Elastic Vibro-Impact Macrosystems and Microsystems; Overview of Important New Effects of Nonlinear Dynamics in Vibro-Impact; Macrosystems;;Analysis of Coupled-Field Dynamics in