Introduction to Microfabrication Franssila Sami
Introduction to Microfabrication Franssila Sami This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern…
Specifikacia Introduction to Microfabrication Franssila Sami
Introduction to Microfabrication Franssila Sami
This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered.This second edition includes:expanded sections on MEMS and microfluidics related fabrication issuesnew chapters on polymer and glass microprocessing, as well as serial processing techniques200 completely new and 200 modified figures more coverage of imprinting techniques, process integration and economics of It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between.
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